The recent progress of ongoing efforts at the Army Aviation and Missile Command (AMCOM) to develop microelectromechanical systems (MEMS) technology for military applications is discussed in this paper. The current maturity level of low cost, low power, micro devices in industry, which range from simple temperature and pressure sensors to accelerometers in airbags, provides a viable foundation for the development of rugged MEMS devices for dual-use applications. Early MEMS technology development efforts at AMCOM emphasized inertial MEMS sensors. An Army Science and Technology Objective (STO) project was initiated to develop low cost inertial components with moderate angular rate sensor resolution for measuring pitch and yaw of missile attitude and rotational roll rate. Leveraging the Defense Advanced Research Projects Agency and other Government agencies has resulted in the development of breadboard inertial MEMS devices with improved robustness. During the past two years, MEMS research at AMCOM has been expanded to include environmental MEMS sensors for missile health monitoring, RF-MEMS, optical MEMS devices for beam steering, and micro-optic 'benches' for opto-electronics miniaturization. Additionally, MEMS packaging and integration issues have come into focus and are being addressed. Selected ongoing research efforts in these areas are presented, and some horizon MEMS sensors requirements for Army and law enforcement are presented for consideration.


    Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Recent progress in MEMS technology development for military applications


    Contributors:


    Publication date :

    2001


    Size :

    12 Seiten, 11 Quellen




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    RECENT PROGRESS IN MILITARY AVIATION

    MARTIN, H S | SAE Technical Papers | 1921


    Recent progress in military aviation

    Martin, H.S. | Engineering Index Backfile | 1921




    Recent Progress in Silicon-based MEMS Field Emission Thrusters

    Lenard, R. X. / Kravitz, S. H. / Tajmar, M. | British Library Conference Proceedings | 2005