The authors report on the developrnent of single deposition GMR sensors for rotational speed sensing in automotive applications. The sensor layout consists of a full Wheatstone bridge configuration with an active area of 0.25 mm2. The desired bridge configuration is achieved via a current anneal process which sets the bias directions of the two half bridges in opposite directions. These sensors show excellent perforrnance parameters like a sensitivity of 10 (mV/V)/(kA/m) to 18 (mV/V)/(kA/m), a hysteresis of less than 0.1 kA/m and low offset-voltage drift of 1(microV/V)/K. The sensors are stable up to fields of 200 kA/m and can withstand operation temperatures exceeding 170 deg C.
Single deposition GMR sensors for rotational speed sensing
Ein magnetoresistiver Sensor für die Messung der Rotationsgeschwindigkeit
2001
4 Seiten, 5 Bilder, 7 Quellen
Conference paper
English
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