LETI LIR has been involved in amorphous silicon uncooled microbolometer development since 1993. This silicon IR detection technology is now well mastered and very fast industrial transfer has been performed toward Sofradir. The state of the art of this technology in terms of manufacturing and performance will be presented. The main features of the model will be explained, which is a key tool to optimise future technological choice and circuit design. Equations for signal-to-noise ratio allows us to determine the best operating conditions for the readout circuit (bias voltage integration time) and sustains the technological development orientation (thermal resistance, 1/f noise coefficient). The next generation readout circuit has already been implemented and wafer fabrication is now providing 2D arrays. This new IRFPA is a 320 x 240 array with a pixel pitch of 45 micron. The performance is better than 80 mK at 30 Hz image frequency. This product is being commercialised by the industrial partner Sofradir.
High reliability and low cost uncooled microbolometer IR focal plane array technology for commercial application
Ein ungekühltes Mikrobolometer mit hoher Zuverlässigkeit und geringen Kosten auf Basis der IR fokalen, ebenen Feldtechnologie
2001
12 Seiten, 10 Bilder, 5 Quellen
Conference paper
English
British Library Conference Proceedings | 2001
|Uncooled focal plane array technology
Online Contents | 1995
Advanced high-performance 320x240 VO~x microbolometer uncooled IR focal plane [3698-19]
British Library Conference Proceedings | 1999
|British Library Conference Proceedings | 2004
|