The MEMS Technology Group is part of the Microdevices Laboratory (MDL) at the JPL. The group pursues the development of a wide range of advanced MEMS technologies that are primarily applicable to NASA's robotic as well as manned exploration missions. Thus these technologies are ideally suited for the demanding requirements of space missions namely, low mass, low power consumption and high reliability, without significant loss of capability. End-to-end development of these technologies is conducted at the MDL, a 38,000 sq. ft. facility with approximately 5500 sq. ft. each of cleanroom and characterization laboratory space. MDL facilities include computer design and simulation tools, optical and electron-beam lithography, thin film deposition equipment, dry and wet etching facilities including deep RIE, device assembly and testing facilities. The MEMS Group is also actively pursuing the rapid, low-cost, space-testing of its devices via a proposed DARPA/NASA/Air Force PICOSAT platform. The space-based tests are expected to provide space-truth for critical operational parameters of the MEMS devices that can be correlated to the ground-based reliability assurance testing. Some of the key MEMS technologies being developed currently by the group include a vibratory microgyroscope, LIGA-based devices, micropropulsion devices, microvalves, adaptive optics, microactuators, biomedical devices, system-on-a-chip, microinstruments and packaging. Future growth areas for the MEMS group are expected to be in the areas of nanotechnology and biotechnology.


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