Advanced automobile electronic systems such as overroll protection, electronic skidding protection and x-by-wire systems require at least one robust and reliable angular rate sensor. Therefore a silicon micromachined gyroscope based on a tuning fork strructure was developed with all resonant frequencies being above 10 kHz and the primary and secondary gyroscope oscillation frequencies being close to 40 kHz. Additionally, no other resonant frequencies are within a bandwidth of 10 kHz around the gyroscope modes in order to be insensitive to random vibrations occurring in automotive applications and to withstand high shock impacts. The tines of the bulk micromachined tuning fork structure are parallel to the wafer surface and the tines are piezoelectriclly excitated perpendicular to the wafer surface. The direction of sensitivity is parallel to the stem. Due to the Coriolis effect, the angular rate is proportional to the torsional amplitude around the axis of the stem. This torsional oscillation is detected with an implanted piezoresistor located in the middle of the stem. A slot in the center of the stem enhances the shear stress at the read-out piezoresistor resulting in a large angular rate sensitivity. For most automotive applications, a reliable sensor functioning is indispensible. Therefore, a comprehensive self test feature was developed. It allows a simultaneous testing of the complete dynamic range during the undisturbed measurement. This concept employs a split electrode configuration which can also be used for electronic compensation of mechanical imbalance in order to reduce the sensor offset and offset drift.
Robust and selftestable silicon tuning fork gyroscope with enhanced resolution
Stimmgabel-Gyroskop
2000
13 Seiten, 9 Bilder, 28 Quellen
Conference paper
English
Autoelektrik , Dauerschwingfestigkeit , Drehgeber , Gyroskop , Messempfindlichkeit , Mikrofertigung , piezoelektrischer Aufnehmer , Rauschunempfindlichkeit , Resonanzfrequenz , Robustheit , Schwingungsprüfung , Selbstüberwachung , Silicium , Torsionsschwingung , Winkelbeschleunigungsmessung , zusammengesetzter Schwinger
Robust and Selftestable Silicon Tuning Fork Gyroscope with Enhanced Resolution
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