An acceleration threshold sensor fabricated with an electroplating technology on top of a CMOS signal processing circuit is presented in this paper. Manufacturing of the device is achieved using a standard low-cost CMOS production line and employing a specialized back-end process for adding the mechanical sensor-elements. This production technology makes the system especially interesting for automotive applications in airbag systems or transportation shock monitoring systems. These applications demand smaller size, improved functionality, high reliability and low costs, factors that can be satisfied with this new technology. The initial additive electroplating technology (AET) has been improved by coating the basic structures with an electroplated alloy. Additionally, a specialized packaging procedure has been developed to hermetically seal the sensor-structures following their release after the sacrificial layer removal. The devices are finally SMD-packaged to allow for easy handling. Samples of the device have been tested extensively and have successfully proven its functionality.
Acceleration threshold switches from an additive electroplating MEMS process
EUROSENSORS, EUROSENSORS, 1999 ; 418-423
Sensors and Actuators, A, Physical ; 85 , 1-3
2000
6 Seiten, 8 Quellen
Conference paper
English
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