Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Laser-induced damage in pellicles at 193 nm


    Contributors:

    Conference:

    Optical/Laser Microlithography V ; 1992 ; San Jose,CA,United States


    Published in:

    Publication date :

    1992-06-01





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Laser Induced Damage In The Ultraviolet

    Wiseall, S. S. / Emmony, D. C. | SPIE | 1983


    Creation of laser-induced damage images

    Troitski, Igor N. | SPIE | 2000


    Laser-induced damage criterion [2966-44]

    Koldunov, M. F. / Manenkov, A. A. / Pokotilo, I. L. et al. | British Library Conference Proceedings | 1997



    Standard laser-induced damage measurement of CO~2-laser optics

    Plass, W. / Giesen, A. / Huegel, H. | British Library Online Contents | 1998