Laser micro processing technology has been applied to industries in a number of aspects: (1) laser cleaning, laser deflash and plasma-assisted laser micro processing, (2) laser texturing, laser bumping and related technologies, (3) real-time monitoring of laser surface processing, (4) laser- induced controllable periodic structures and (5) laser nano- etching and nano lithography by tip-enhanced laser irradiation.
Laser microprocessing and its applications in the microelectronics industry
Laser-Assisted Microtechnology 2000 ; 2000 ; St. Petersburg-Pushkin,Russian Federation
Proc. SPIE ; 4157
2001-01-30
Conference paper
Electronic Resource
English
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