Laser micro processing technology has been applied to industries in a number of aspects: (1) laser cleaning, laser deflash and plasma-assisted laser micro processing, (2) laser texturing, laser bumping and related technologies, (3) real-time monitoring of laser surface processing, (4) laser- induced controllable periodic structures and (5) laser nano- etching and nano lithography by tip-enhanced laser irradiation.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Laser microprocessing and its applications in the microelectronics industry


    Contributors:

    Conference:

    Laser-Assisted Microtechnology 2000 ; 2000 ; St. Petersburg-Pushkin,Russian Federation


    Published in:

    Publication date :

    2001-01-30





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Microprocessing by UV laser

    Lou, Qihong / Li, Tiejun | SPIE | 2002


    Industrial Microprocessing Applications Of Excimer Lasers

    Sercel, J. / Sowada, U. / Kahlert, H J. et al. | SPIE | 1988


    Laser microprocessing unit and its application [4088-111]

    Fukumitsu, K. / Oie, T. / Japan Laser Processing Society et al. | British Library Conference Proceedings | 2000


    Nanosatellites and MEMS fabrication by laser microprocessing

    Helvajian, H. / Fuqua, P.D. / Hansen, W.W. et al. | Tema Archive | 2000


    Laser microprocessing of wide-bandgap materials [4831-121]

    Salama, I. A. / Quick, N. R. / Kar, A. et al. | British Library Conference Proceedings | 2003