We report high resolution imaging results obtained utilizing small-scale extreme ultraviolet laser sources. A compact capillary-discharge pumped Ne-like Ar laser emitting at a wavelength of 46.9 nm was used to demonstrate imaging with nanometer-scale resolution in transmission and reflection modes. We exploited the large photon fluence of this short wavelength laser to obtain high-resolution images with exposure times as short as 1-10 seconds. Images with a spatial resolution better than 140 nm were obtained using the combination of a Sc/Si multilayer coated Schwarzschild condenser and free-standing objective zone plate. Preliminary results of imaging with a 13.9 nm extreme ultraviolet laser light are also discussed.


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    Title :

    Nano-imaging with compact extreme ultraviolet laser sources


    Contributors:
    Vaschenko, G. (author) / Brizuela, F. (author) / Brewer, C. (author) / Grisham, M. (author) / Wang, Y. (author) / Larotonda, M. A. (author) / Luther, B. M. (author) / Menoni, C. S. (author) / Marconi, M. (author) / Rocca, J. J. (author)

    Conference:

    Metrology, Inspection, and Process Control for Microlithography XIX ; 2005 ; San Jose,California,United States


    Published in:

    Publication date :

    2005-05-10





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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