Excimer lasers form a group of pulsed high-pressure gas lasers which emit at four wave-lengths, namely at 193nm (ArF*), 248nm (KrF*), 308nm (XeCl*) and 351nm (XeF*) in the ultraviolet spectral region. Unlike the infrared radiation from lasers like e.g. Nd:YAG and CO2, the high energy photons from excimer lasers typically interact with the electronic excitation levels of an absorber and this can lead to chemical bond breaking, ionization or electronic excitation. The excellent focusability of their short wave-length radiation can further be exploited to generate submicron structures.
Commercial Excimer Lasers
Scientific and Engineering Applications of Commercial Laser Devices ; 1986 ; Los Angeles,CA,United States
Proc. SPIE ; 0610
1986-07-16
Conference paper
Electronic Resource
English
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