Much work has been conducted and published in the area of radiation hardening of electronics. These efforts have yielded an array of techniques and design protocols for mitigating radiation effects in hardware. However, in the field of MEMS sensor systems, radiation can impact not only the support structure but the MEMS structure itself. In this work, a new multiple degree-of-freedom MEMS inertial sensor called MARS (MEMS Annular Rotating Sensor) has been subjected to Co60 gamma-ray irradiation and results analyzed for total dose effects. Pre- and post-radiation tests reveal that the sensor's accelerometer noise performance is enhanced by the exposure. Quantitatively, noise levels improved after radiation by roughly 40% in the X and Y axes and 75% in the Z axes. Additionally, any effects of radiation on sensor offset were not discernable.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Radiation effects on multiple DOF MEMS inertial sensors


    Contributors:

    Conference:

    Nanophotonics and Macrophotonics for Space Environments V ; 2011 ; San Diego,California,United States


    Published in:

    Publication date :

    2011-09-01





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Radiation effects on multiple DOF MEMS inertial sensors (Invited Paper) [8164-26]

    Dillard, B. / Trent, V. / Greene, M. et al. | British Library Conference Proceedings | 2011


    Performance of MEMS inertial sensors

    Kourepenis, A. / Borenstein, J. / Connelly, J. et al. | IEEE | 1998


    Performance of MEMS inertial sensors

    Kourepenis, A. / Borenstein, J. / Connelly, J. et al. | AIAA | 1998


    Performance of MEMS Inertial Sensors

    Kourepenis, A. / Borenstein, J. / Connelly, J. et al. | British Library Conference Proceedings | 1998


    Performance of MEMS inertial sensors

    Kourepenis, A. / Borenstein, J. / Connelly, J. et al. | Tema Archive | 1998