Absolute and differential fiber optic pressure sensors are described in this paper that have .1% resolution and are produced by integrated circuit techniques with yields of thousands per 3" wafer. Sensor performance can be tailored to application with full scale responses ranging from 5" of water (9 mmHg) to greater than 1000 psi (700KPa).


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    Title :

    Multimode Fiber Optic Pressure Sensor With Extended Range


    Contributors:

    Conference:

    Fiber Optic and Laser Sensors V ; 1986 ; San Diego,CA,United States


    Published in:

    Publication date :

    1988-03-23





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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