Future advanced fixed- and rotary-wing aircraft, launch vehicles, and spacecraft will incorporate smart microsensors to monitor flight integrity and provide flight control inputs. This paper provides an overview of Honeywell's MEMS technologies for aerospace applications of sensing and control. A unique second-generation polysilicon resonant microbeam sensor design is described. It incorporates a micron-level vacuum-encapsulated microbeam to optically sense aerodynamic parameters and to optically excite the sensor pick off: optically excited self-resonant microbeams form the basis for a new class of versatile, high- performance, low-cost MEMS sensors that uniquely combine silicon microfabrication technology with optoelectronic technology that can sense dynamic pressure, acceleration forces, acoustic emission, and many other aerospace parameters of interest. Honeywell's recent work in MEMS tuning fork gyros for inertial sensing and a MEMS free- piston engine are also described.


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    Title :

    MEMS sensing and control: an aerospace perspective


    Contributors:

    Conference:

    Smart Structures and Materials 2000: Smart Electronics and MEMS ; 2000 ; Newport Beach,CA,USA


    Published in:

    Proc. SPIE ; 3990 ; 22


    Publication date :

    2000-06-21





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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