We developed amorphous alloy thin films having TCR(temperature coefficient of resistivity) less than ±5 ppm/°C for strain gauge applications. Thin film strain gauges are directly formed on metal substrates insulated with SiO2. These gauges have excellent aging stability at high temperature. The resistivity shows a drift in ▵R/R less than ±0.03% at 120°C in 1000 hours. We developed a pressure sensor and an acceleration sensor with high accuracy and reliability, employing these gauges.


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    Title :

    Thin Film Strain Gauge Sensors for Automotive Applications


    Additional title:

    Sae Technical Papers


    Contributors:

    Conference:

    International Congress & Exposition ; 1993



    Publication date :

    1993-03-01




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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