Active vibration isolation of macro–micro motion stage disturbances using a floating stator platform
2015
Article (Journal)
English
On active vibration isolation of floating raft system
Online Contents | 2005
|Active and passive integrated vibration isolation device and vibration isolation platform
European Patent Office | 2015
|Control algorithms for active vibration isolation systems subject to random disturbances
Online Contents | 2006
|European Patent Office | 2024
|