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    Title :

    Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone



    Published in:

    Publication date :

    2008



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English



    Classification :

    BKL:    33.12 Akustik / 50.36 Technische Akustik / 53.79 Elektroakustik, Tonstudiotechnik / 50.32 Dynamik, Schwingungslehre / 58.56 Lärmschutz, Erschütterungsdämpfung
    Local classification TIB:    275/3425



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