Stress Analysis of a Silicon-Wafer Slicer Cutting the Crystal Ingot
Journal of mechanical design ; 115 , 4 ; 711-717
1993
Article (Journal)
Unknown
BKL: | 50.15 Konstruktionslehre / 52.15 Maschinenelemente, Maschinenbaugruppen / 52.20 Antriebstechnik, Getriebelehre | |
Local classification TIB: | 770/5315/5330 |
High-Production Silicon-Ingot Slicer
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