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    Title :

    Electrical conductivity in Li-Si-P-O-N oxynitride thin-films



    Published in:

    Journal of power sources ; 123 , 1 ; 61-64


    Publication date :

    2004



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English



    Classification :

    Local classification TIB:    645/5625
    BKL:    52.57 Energiespeicherung / 53.36 Energiedirektumwandler, elektrische Energiespeicher





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    An IR spectroscopic study of silicon oxynitride films

    Priebe, A. / Walter, N. / Pucci, A. | IEEE | 2004