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    Title :

    Reduction of plasma-induced damage by electron beam excited plasma CVD




    Publication date :

    2001



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English



    Classification :

    BKL:    53.36 Energiedirektumwandler, elektrische Energiespeicher / 52.52 Thermische Energieerzeugung, Wärmetechnik / 52.56 Regenerative Energieformen, alternative Energieformen / 50.70 Energie: Allgemeines




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