Influence of hydrogen dilution on low-temperature polycrystalline silicon formation using RF excitation SiH4-H2 plasma
Solar energy materials & solar cells ; 62 , 1-2
2000
Article (Journal)
English
Reflected-Shock Ignition of SiH4-H2-O2-Ar and SiH4-CH4-O2-Ar Mixtures
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|Total SiH4-H2 pressure effect on microcrystalline silicon thin films growth and structure
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