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    Title :

    Finite Element Analysis of the Microisolation Valve


    Contributors:
    Man, K. (author) / Forgrave, J. (author) / Mueller, J. (author)

    Conference:

    MEMS Reliability and Qualification Workshop II


    Publication date :

    1998-08-04


    Type of media :

    Conference paper


    Type of material :

    No indication


    Language :

    English




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