Micro-Electrical Mechanical Systems (MEMS) are entering the stage of design and verification to demonstrate the utility of the technology for a wide range of applications including sensors and actuators for military, space, medical, industrial, consumer, automotive and instrumentation products.


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    Title :

    MEMS for Space Flight Applications


    Contributors:
    Lawton, R. (author)

    Conference:

    MEMS Reliability and Qualification Workshop


    Publication date :

    1998-08-04


    Type of media :

    Conference paper


    Type of material :

    No indication


    Language :

    English




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