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    Title :

    Electromigration issues in state-of-the art and emerging metallization systems


    Contributors:
    Leon, R. (author) / Vu, D. (author) / Colon, J. (author) / Ruiz, R. (author) / Johnson, S. (author) / Okuno, J. (author) / Evans, K. (author) / Lloyd, J. R. (author)

    Conference:

    NEPP Conference


    Publication date :

    2002-04-30


    Type of media :

    Conference paper


    Type of material :

    No indication


    Language :

    English





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