Vacuum-bakeout apparatus for decontaminating and measuring outgassing from pieces of equipment constructed by mounting bakeout chamber within conventional vacuum chamber. Upgrade cost effective: fabrication and installation of bakeout chamber simple, installation performed quickly and without major changes in older vacuum chamber, and provides quantitative data on outgassing from pieces of equipment placed in bakeout chamber.


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    Title :

    Bakeout Chamber Within Vacuum Chamber


    Contributors:

    Published in:

    Publication date :

    1995-05-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English





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