Spectroscopic ellipsometry is demonstrated to be extremely sensitive to contamination layers in the thickness range from 0.1 nm to 10 microns. In the present experiments we deposit either a thin lubricating oil (WD-40) or mineral oil continuously onto Ir, Cu, Al, Au, and V substrates from a bubbler, and monitor its thickness growth from sub-nanometer to tens of nanometers as a function of time. Re-evaporation of contaminant oils is also monitored in real-time by ellipsometry.


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    Title :

    Spectroscopic ellipsometry as a sensitive monitor of materials contamination


    Contributors:


    Publication date :

    1995-03-01


    Type of media :

    Conference paper


    Type of material :

    No indication


    Language :

    English





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