Sensor systems of proposed type incorporate micromachined silicon-based structures as electrostatic force and displacement actuators and micromachined quantum-mechanical-tunneling electrodes as one form of displacement transducers, along with electronic circuits providing multiple electrical stimuli to displacement electrodes for measurement, calibration, monitoring of sensor status, and adjustment. Concept applicable to accelerometers, seismometers, geophones, magnetometers, pressure gauges, and other sensors in which phenomena of interest measured in terms of forces on, and/or displacements of, structural components. Provides completely remote measurement, control, health monitoring, treatment, and like, using telemetry commands.
Improved Micromachined Transducers
NASA Tech Briefs ; 18 , 6
1994-06-01
Miscellaneous
No indication
English
Improved Micromachined Transducers
Online Contents | 1994
Capacitive Micromachined Ultrasonic Transducers: Theory and Technology
Online Contents | 2003
|Simulation of silicon micromachined ultrasonic transducers [5253-04]
British Library Conference Proceedings | 2003
|Micromachined ultrasonic transducers for damage detection in CFRP composites
Tema Archive | 1999
|Micromachined ultrasonic transducers for air-coupled nondestructive evaluation [3586-43]
British Library Conference Proceedings | 1998
|