Wavelength of peak transmission of proposed high-throughput, narrow-band-pass x-ray or extreme-ultraviolet monochromator continuously adjustable. Essential filtering and reflecting components designed according to principles described in "Compact X-Ray and Extreme-Ultraviolet Monochromator" (MFS-28499). However, angle of incidence varied to change wavelength of Bragg reflection.


    Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    Scanning X-Ray Or Extreme-Ultraviolet Monochromator


    Contributors:

    Published in:

    Publication date :

    1991-08-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English






    VACUUM ULTRAVIOLET MONOCHROMATOR

    Hartman, P. L. | NTRS | 1962


    Extreme ultraviolet lithography

    Bokor, J. / Optical Society of America | British Library Conference Proceedings | 1997


    Extreme Ultraviolet Lithography

    Stulen, R. H. / Sweeney, D. W. | British Library Online Contents | 1999