Wavelength of peak transmission of proposed high-throughput, narrow-band-pass x-ray or extreme-ultraviolet monochromator continuously adjustable. Essential filtering and reflecting components designed according to principles described in "Compact X-Ray and Extreme-Ultraviolet Monochromator" (MFS-28499). However, angle of incidence varied to change wavelength of Bragg reflection.
Scanning X-Ray Or Extreme-Ultraviolet Monochromator
NASA Tech Briefs ; 15 , 8
1991-08-01
Miscellaneous
No indication
English
Compact X-Ray And Extreme-Ultraviolet Monochromator
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|VACUUM ULTRAVIOLET MONOCHROMATOR
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|Extreme ultraviolet lithography
British Library Conference Proceedings | 1997
|Extreme Ultraviolet Lithography
British Library Online Contents | 1999
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