Set of baffles just below exit duct of silicon-ribbon-growing furnace reduces thermal stresses in ribbons so wider ribbons grown. Productivity of furnace increased. Diverts plume of hot gas from ribbon and allows cooler gas from top of furnace to flow around. Also shields ribbon from thermal radiation from hot growth assembly. Ribbon cooled to lower temperature before reaching cooler exit duct, avoiding abrupt drop in temperature as entering duct.


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    Title :

    Baffles Promote Wider, Thinner Silicon Ribbons



    Published in:

    Publication date :

    1989-08-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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