Simple, inexpensive apparatus coats semiconductor wafers uniformly with hydrofluoric acid for etching. Apparatus made in part from small commercial electric-fan motor. Features bowl that collects acid. Silicon wafer placed on platform and centered on axis; motor switched on. As wafer spins, drops of hydrofluoric acid applied from syringe. Centrifugal force spreads acid across wafer in fairly uniform sheet.


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    Title :

    Spinner For Etching Of Semiconductor Wafers


    Contributors:

    Published in:

    Publication date :

    1989-04-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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