Laser beam scanned to produce moving melt zone. Experimental laser vacuum furnace scans crystalline wafer with high-power CO2-laser beam to generate precise melt zone with precise control of temperature gradients around zone. Intended for zone refining of silicon or other semiconductors in low gravity, apparatus used in normal gravity.


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    Title :

    Laser Vacuum Furnace for Zone Refining


    Contributors:

    Published in:

    Publication date :

    1986-11-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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