Sputtered sprayed lines less than 2 millimeters wide made by superimposing masks with partially overlapping openings. Slits first cut in masks by stamping or other economical process. Masks superimposed so slits define new openings narrower than original slits.


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    Title :

    Inexpensive Masks for Film Deposition


    Contributors:

    Published in:

    Publication date :

    1986-03-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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