The role of float zone silicon in integrated circuits is surveyed. The problem of oxygen thermal donors and their inhomogeneous distribution is predicted to be a critical issue.


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    Title :

    Float zone space processing rationale


    Contributors:


    Publication date :

    1981-09-01


    Type of media :

    Conference paper


    Type of material :

    No indication


    Language :

    English




    Float Zone Workshop

    E. L. Kern / E. K. Cothran | NTRS | 1981


    Float Zone Workshop

    Naumann, R. J. | NTRS | 1980


    Float Zone Workshop

    E. L. Kern / E. K. Cothran | NTIS | 1981


    Float Zone Workshop

    R. J. Naumann | NTIS | 1980