The role of float zone silicon in integrated circuits is surveyed. The problem of oxygen thermal donors and their inhomogeneous distribution is predicted to be a critical issue.
Float zone space processing rationale
1981-09-01
Conference paper
No indication
English
NTRS | 1981
|NTRS | 1980
|NTIS | 1981
|NTIS | 1980
|Float-zone processing in a weightless environment
TIBKAT | 1976
|