The feasibility of Union Carbide's silane process for commercial application was established. An integrated process design for an experimental process system development unit and a commercial facility were developed. The corresponding commercial plant economic performance was then estimated.
Low-cost Solar Array Project. Feasibility of the Silane Process for Producing Semiconductor-grade Silicon
1979-06-01
Report
No indication
English
NTRS | 1978
|Plasma-refining process to provide solar-grade silicon
Online Contents | 2002
|