Three detectors sense He-Ne laser beam; one senses reference phase while others, at right angles to first, sense phase offset for each axis. Analog output of axis detectors is multiplied separately by reference output to give X and Y error signals that are then fed to respective X and Y actuators.


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    Title :

    Servo corrects interferometer-mirror tilt


    Contributors:

    Published in:

    Publication date :

    1977-03-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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