Backside illuminated CCD imagers with 100 x 160 resolution elements have been fabricated using double level metal technology. Detailed study of the optical performance of such arrays has been performed between 24 C and -40 C using data rates from 10 kHz to 1 MHz. A 400 x 400 array is presently being fabricated.


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    Title :

    Large-area CCD imagers for spacecraft applications


    Contributors:


    Publication date :

    1975-06-10


    Type of media :

    Conference paper


    Type of material :

    No indication


    Language :

    English


    Keywords :



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