Backside illuminated CCD imagers with 100 x 160 resolution elements have been fabricated using double level metal technology. Detailed study of the optical performance of such arrays has been performed between 24 C and -40 C using data rates from 10 kHz to 1 MHz. A 400 x 400 array is presently being fabricated.
Large-area CCD imagers for spacecraft applications
1975-06-10
Conference paper
No indication
English
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