Leak rate measurement accuracy of rate-of-rise technique for nitrogen, methane and He between millionth and thousandth torr


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    Title :

    Experimental evaluation of the rate-of-rise method for measuring outgassing rates of three gases between 10 super minus super 6 and 10 super minus super 3 torr.


    Contributors:

    Publication date :

    1969-04-01


    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English