An apparatus for transferring and manipulating a plurality of containers in a sequence is disclosed including a mechanical manipulator arm having a gripping device which automatically picks up a container at a fixed pickup position and transfers it to a processing station. At a processing station, the container is loaded with silicon wafers and thereafter returned to the pickup and return station. A plurality of the containers may be processed in sequence from the fixed pickup position by providing a movable carriage upon which container pedestal platforms are supported, at least one of which is an elevator platform. Sensing switches may be provided for sensing movements of the arm, carriage, and elevator platform whereby the entire apparatus may be controlled automatically avoiding the need to handle the wafers manually to reduce the possibility of contamination.
Apparatus for Sequentially Transporting Containers
1980
20 pages
Report
No indication
English
Apparatus for sequentially transporting containers
NTRS | 1982
|Apparatus for Sequentially Transporting Containers
NTIS | 1980
|METHOD FOR TRANSPORTING GOODS IN CONTAINERS AND THE WAGON FOR TRANSPORTING CONTAINERS
European Patent Office | 2021
|