An apparatus for transferring and manipulating a plurality of containers in a sequence is disclosed including a mechanical manipulator arm having a gripping device which automatically picks up a container at a fixed pickup position and transfers it to a processing station. At a processing station, the container is loaded with silicon wafers and thereafter returned to the pickup and return station. A plurality of the containers may be processed in sequence from the fixed pickup position by providing a movable carriage upon which container pedestal platforms are supported, at least one of which is an elevator platform. Sensing switches may be provided for sensing movements of the arm, carriage, and elevator platform whereby the entire apparatus may be controlled automatically avoiding the need to handle the wafers manually to reduce the possibility of contamination.


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    Title :

    Apparatus for Sequentially Transporting Containers


    Contributors:

    Publication date :

    1980


    Size :

    20 pages


    Type of media :

    Report


    Type of material :

    No indication


    Language :

    English






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