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    Title :

    Electrostatically Actuated Resonant Microcantilever Beam in CMOS Technology for the Detection of Chemical Weapons


    Contributors:
    I. Voiculescu (author) / M. E. Zaghloul (author) / R. A. McGill (author) / E. J. Houser (author) / G. K. Fedder (author)

    Publication date :

    2005


    Size :

    8 pages


    Type of media :

    Report


    Type of material :

    No indication


    Language :

    English





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