A novel, truly CMOS compatible, waveguide coupled, high-speed photodiode for on-chip optical clock distribution is designed using analytical calculations, electro-optical simulations, and experimental analysis. Experiment and simulation results from test devices are presented and analyzed. Results from test devices and waveguides currently under fabrication in the Agilent 0.35 /spl mu/m CMOS process will be reported.
Waveguide coupled CMOS photodetector for on-chip optical interconnects
2004-01-01
135370 byte
Conference paper
Electronic Resource
English
Waveguide Coupled CMOS Photodetector for On-Chip Optical Interconnects
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