We describe a concept for a metrology system that can simultaneously determine the Cartesian coordinates of thousands of targets and has no moving parts. The system is called the MSTAR3D system and is based on two color interferometry where the conventional photodiode has been replaced with an extremely fast focal plane array. It permits the measurement of the three-dimensional position of multiple targets with a fraction of a millimeter accuracy. In this paper, the concept will be described in detail. Proof of concept measurements have been performed on a candidate camera. The measured parameters have been used in error budgets for performance validation of the concept. It will be shown that a metrology system like MSTAR3D can determine the xyz position with sub-millimeter accuracy. This is sufficient accuracy for most large structure metrology systems and wave front corrections for large radar antennas.


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    Title :

    3D Metrology Camera


    Contributors:


    Publication date :

    2007-03-01


    Size :

    543092 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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