We developed new fabrication technology of convex and concave microlens using UV curing method. The merits of this technology are: (1) high quality microlenses are fabricated by very simple process; (2) microlens radius is easily controlled by varying pedestal size and quantity of injected liquid material; (3) the distance between lens and substrate can be controlled by pedestal height; (4) various shaped microlenses can be formed on same substrate. We believe that this fabrication technology of microlens has wide application as parts for optical system and optical devices.
New fabrication technology of convex and concave microlens using UV curing method
1999-01-01
186733 byte
Conference paper
Electronic Resource
English
New Fabrication Technology of Convex and Concave Microlens Using UV Curing Method
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