Recent progress in the development of the optical micro-electro-mechanical systems (MEMS) is reviewed with emphasis on their applications in the field of telecommunications. Both the scientific and the industrial aspects of the components are considered. Different structures are reported and, when necessary, briefly explained showing the main difficulties in development as well as state of the art performance. The possibility of industrialization has gained special interest in our discussion.
Recent trends in optical MEMS for telecommunication applications
2004-01-01
1622635 byte
Conference paper
Electronic Resource
English
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