Summary form only given. In summary, we have demonstrated an optimized MOVPE technique for highly uniform and reproducible VCSEL growth, enabling high performance oxide-confined VCSELs with uniform lasing characteristics. In this paper, we show the capability to produce extremely high wafer uniformity, control accuracy on thickness and composition, and run-to-run reproducibility.


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    Title :

    MOVPE growth of oxide-confined vertical-cavity surface emitting lasers


    Contributors:
    Hou, H.Q. (author) / Choquette, K.D. (author) / Hammons, B.E. (author) / Breiland, W.G. (author) / Geib, K.M. (author)


    Publication date :

    1997-01-01


    Size :

    148611 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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