Summary form only given. In summary, we have demonstrated an optimized MOVPE technique for highly uniform and reproducible VCSEL growth, enabling high performance oxide-confined VCSELs with uniform lasing characteristics. In this paper, we show the capability to produce extremely high wafer uniformity, control accuracy on thickness and composition, and run-to-run reproducibility.
MOVPE growth of oxide-confined vertical-cavity surface emitting lasers
1997-01-01
148611 byte
Conference paper
Electronic Resource
English
MOVPE Growth of Oxide-confined Vertical-Cavity Surface Emitting Lasers
British Library Conference Proceedings | 1997
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