The seperation of thin film epitaxial devices from the growth substrated is called epitaxial lift off, and the subsequent transfer and bonding of these thin film devices to smooth substrates such as Si integrated circuits is studied.<>
Epitaxial liftoff of GaAs detectors onto silicon integrated circuits
Proceedings of LEOS '93 ; 664-665
1993-01-01
179495 byte
Conference paper
Electronic Resource
English
Epitaxial Liftoff of GaAs Detector onto Silicon Integrated Circuits
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