The fabrication tolerance of the highly reflective sub-wavelength grating (SWG) structure is examined, particularly the effect of reflectivity from etching imperfections, with calculations using rigorous coupled wave analysis method.
Large fabrication tolerance of ultrabroadband sub-wavelength grating reflector
2004-01-01
127698 byte
Conference paper
Electronic Resource
English
Large Fabrication Tolerance of Ultra Broadband Sub-Wavelength Grating Reflector
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