The fabrication tolerance of the highly reflective sub-wavelength grating (SWG) structure is examined, particularly the effect of reflectivity from etching imperfections, with calculations using rigorous coupled wave analysis method.


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    Title :

    Large fabrication tolerance of ultrabroadband sub-wavelength grating reflector


    Contributors:


    Publication date :

    2004-01-01


    Size :

    127698 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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