In order to obtain resolution higher than Rayleigh's limit of resolution /spl epsi//sub R/, we use Gaussian pupil which gives the diffraction intensity distribution with resolution /spl epsi//sub G/
Resolving power of the Gaussian pupil optical lithography system beyond Rayleigh's limit of resolution
1999-01-01
84215 byte
Conference paper
Electronic Resource
English
Nonlinear, rarefied Rayleigh's problem.
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