In order to obtain resolution higher than Rayleigh's limit of resolution /spl epsi//sub R/, we use Gaussian pupil which gives the diffraction intensity distribution with resolution /spl epsi//sub G/


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    Title :

    Resolving power of the Gaussian pupil optical lithography system beyond Rayleigh's limit of resolution


    Contributors:


    Publication date :

    1999-01-01


    Size :

    84215 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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