We evaluated the measurement accuracy of the profilometry based on two-photon absorption It was confirmed that the measurement accuracy was inversely proportional to distance and scanning frequency range, and it was typically the order of 10/sup -4/ for about 1 m.


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    Title :

    Measurement accuracy of profilometry based on two-photon absorption


    Contributors:
    Sako, N. (author) / Imoto, S. (author) / Tanaka, Y. (author) / Kurokawa, T. (author)


    Publication date :

    2003-01-01


    Size :

    92750 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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