Novel RF-MEMS extended tuning range varactors are being developed for incorporation in arrays of RF MEMS based true time delay lines for use in millimeter-wave Phased Antenna Array (PAA) systems. A frequency of 28 GHz (Ka-Band) has been selected for the activity since it is a frequency region of considerable commercial, scientific, and military interest as well as being sufficiently high to result in small size units. The design of the 28 GHz proof-of-principle RF MEMS varactor based true time delay line is presented together with the fabrication process and the initial measurement results.
MEMS Extended Tuning Range Varactor-Based True Time Delay Line Technology
2006-09-01
1186949 byte
Conference paper
Electronic Resource
English
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