A micromachined 8 x 1 vertical three-dimensional micro-Fresnel lens array and its hybrid integration with a self-aligned vertical cavity surface emitting laser (VCSEL) array have been demonstrated for the first time. With their unique three-dimensional and array structures, they are suitable for integration with other similarly fabricated micro-optical components such as rotatable mirrors, gratings and beam-splitters as well as other active micro-optical elements. This new technique has great potential for free-space optical interconnects.


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    Title :

    An 8/spl times/1 micromachined micro-Fresnel lens array for free-space optical interconnect


    Contributors:
    Lee, S.S. (author) / Lin, L.Y. (author) / Pister, K.S.J. (author) / Wu, M.C. (author) / Lee, H.C. (author) / Grodzinski, P. (author)

    Published in:

    Proceedings of LEOS'94 ; 1 ; 242-243 vol.1


    Publication date :

    1994-01-01


    Size :

    262595 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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