A micromachined 8 x 1 vertical three-dimensional micro-Fresnel lens array and its hybrid integration with a self-aligned vertical cavity surface emitting laser (VCSEL) array have been demonstrated for the first time. With their unique three-dimensional and array structures, they are suitable for integration with other similarly fabricated micro-optical components such as rotatable mirrors, gratings and beam-splitters as well as other active micro-optical elements. This new technique has great potential for free-space optical interconnects.
An 8/spl times/1 micromachined micro-Fresnel lens array for free-space optical interconnect
Proceedings of LEOS'94 ; 1 ; 242-243 vol.1
1994-01-01
262595 byte
Conference paper
Electronic Resource
English
An 8 x 1 Micromachined Micro-Fresnel Lens Array for Free- Space Optical Interconnect
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