Micro lens array (MLA) is the critical element for Shack-Hartmann wave front sensor. But conventional MLA based on diffractive optics shows strong chromatic aberration, which cause the MLA only works for narrow band. The broad band MLA requires continuous profile, which can not be fabricated using binary optics fabrication technique. In this presentation, we present the fabrication for continuous aspheric MLA by employing gray scale mask with one-step moving photolithography and one-step etching process. The fabricated MLA exhibits small surface roughness (rms≪5nm), high uniformity of focal length (≪0.6%), nearly 100% filling factor and good focal spots quality approaching diffraction limit. The working wavelength shows wide band (0.45~0.7¿m), promising the MLA can be successfully employed in Shack-Hartmann systems with white light or multiple laser wavelengths.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    High-Performance Continuous Aspheric Microlenses Array For Shack-Hartmann Sensor


    Contributors:
    Qiu, Chuankai (author) / Pan, Li (author) / Li, Fei (author) / Yue, Qu (author) / Liu, Ling (author) / Luo, Xiangang (author)


    Publication date :

    2008-12-01


    Size :

    744681 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    High-Performance Continuous Aspheric Microlenses Array For Shack-Hartmann Sensor

    Qiu, Chuankai / Pan, Li / Li, Fei et al. | IEEE | 2008


    Aspheric metrology with a Shack-Hartmann wavefront sensor [4419-500]

    Greivenkamp, J. E. / Smith, D. G. / Gappinger, R. O. et al. | British Library Conference Proceedings | 2001


    DWB2 Low NA fused silica refractive microlenses for Shack-Hartmann wavefront sensor

    Nussbaum, P. / Gonte, F. / Boillat, C. et al. | British Library Conference Proceedings | 2000


    Shack-Hartmann wavefront sensor testing of aero-optic phenomena

    Neal, Daniel / Hedlund, Eric / Lederer, Melissa et al. | AIAA | 1998


    Shack-Hartmann wavefront sensor testing of aero-optic phenomena

    Neal, D. R. / Hedlund, E. / Lederer, M. et al. | British Library Conference Proceedings | 1998